| 1. | In the depositing process , small angle x - ray diffraction method was used to measure thin films repeatedly , form which the optimized parameters of depositing soft x ray thin films were gained . under the parameters , five soft x ray multilayer mirrors were fabricated
在多层膜的淀积过程中，使用小角x射线衍射的方法对多层镜进行了反复的标定，获得了软x射线短波段多层膜反射镜沉积的优化工艺参数。 |
